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The whole concept of
MEMS is based on using IC technology to make micro mechanical systems but it
turns out conventional IC technology is not enough. We need some additional processes.
One of the key enablers
of MEMS is bulk micromachining, of which the Bosch process is most widely used.
Surface Micromachining is also widely used where
we don’t need such deep structures.
Another widely used
surface micromachining process is LIGA. This can be considered as an
intermediate process between bulk and surface micromachining.
These three processes lie at the heart of most
of the MEMS devices around us.
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ReplyDeleteThank you for your comment and interest. It's six years ago now. I am no longer active in MEMS but I do on-line courses in microelectronic reliability, materials science and surface analysis. Feel free to contact me at alastair@at-micro.com or see my rather out of date website https://at-micro.weebly.com/
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